5 microns in diameter! The world's smallest and brightest UVC LED has been unveiled
发布时间：2021-05-25 15:37
来源：萤光创新
According to foreign media reports, the Us University of South Carolina (the University of South Carolina) scientists have developed the world's smallest and brightest deep ULTRAVIOLET LED, chip size is only 5 microns, wavelength of 281nm. The UVC LED array composed of these chips has a brightness of 361W·cm-2.
A research team at the University of South Carolina began developing small UV LED interconnected arrays in the early 2000s. The first generation OF UV LEDS have a pixel diameter of 25 microns and form a 10×10 array, improving light output power, providing ultra-high reliability, and reducing current crowding, mainly against series resistance and auxiliary current expansion.
Recently, the team re-examined the structure for deep ULTRAVIOLET light sources, focusing on thermal impedance and the effect of pixel size on emission power.
According to team spokesman Richard Floyd, reducing the size of the DEEP UV LED to less than 20 microns does not add to most of the production steps and does not require specialized equipment. For example, the team used standard Photoresist Masking and Karl Suss MBB-3 Mask Aligner for all lithography steps.
However, to ensure uniformity across the wafer, the team optimized the lithographic exposure and development times below 20 microns, as well as the P-pole ohm contact annealing conditions.
The team compared the 90 micron diameter single pixel LED reference with three different array structures: 36 15 micron diameter pixel arrays, 81 10 micron diameter pixel arrays, and 324 5 micron diameter pixel arrays, all with a gap of 5 microns.
Left: 5-micron interconnected pixel array (pixels with a 5-micron gap) right: same array with a dc current of 60mA (image source: university of south Carolina)
According to foreign media reports, the Us University of South Carolina (the University of South Carolina) scientists have developed the world's smallest and brightest deep ULTRAVIOLET LED, chip size is only 5 microns, wavelength of 281nm. The UVC LED array composed of these chips has a brightness of 361W·cm-2.
A research team at the University of South Carolina began developing small UV LED interconnected arrays in the early 2000s. The first generation OF UV LEDS have a pixel diameter of 25 microns and form a 10×10 array, improving light output power, providing ultra-high reliability, and reducing current crowding, mainly against series resistance and auxiliary current expansion.
Recently, the team re-examined the structure for deep ULTRAVIOLET light sources, focusing on thermal impedance and the effect of pixel size on emission power.
According to team spokesman Richard Floyd, reducing the size of the DEEP UV LED to less than 20 microns does not add to most of the production steps and does not require specialized equipment. For example, the team used standard Photoresist Masking and Karl Suss MBB-3 Mask Aligner for all lithography steps.
However, to ensure uniformity across the wafer, the team optimized the lithographic exposure and development times below 20 microns, as well as the P-pole ohm contact annealing conditions.
The team compared the 90 micron diameter single pixel LED reference with three different array structures: 36 15 micron diameter pixel arrays, 81 10 micron diameter pixel arrays, and 324 5 micron diameter pixel arrays, all with a gap of 5 microns.
文章出自：LEDinside
文章关键字：深紫外LED,UVC LED，紫外杀菌，水杀菌，空气杀菌，最小UVCLED
